洁净室区空气洁净度等级表
发布时间:2020-10-23 01:05:37
发布时间:2020-10-23 01:05:37
洁净室区空气洁净度等级表
洁净室(区)空气洁净级别表
洁净度级别 | 尘粒最大允许数/立方米 ≥0.5μm尘粒数 | ≥5μm尘粒数 | 微生物最大允许数 浮游菌/立方米 | 沉降菌/皿 |
100级 | 3,500 | 0 | 5 | 1 |
10,000级 | 350,000 | 2,000 | 100 | 3 |
100,000级 | 3,500,000 | 20,000 | 500 | 10 |
300,000级 | 10,500,000 | 60,000 | 1000 | 15 |
ISO14644-1(国际标准)
空气洁净 度等级(N) | 大于或等于所标粒径的粒子最大浓度限值(空气粒子数个/立方米) | |||||
0.1um | 0.2um | 0.3um | 0.5um | 1.0um | 5.0um | |
ISO Class1 | 10 | 2 | ||||
ISO Class2 | 100 | 24 | 10 | 4 | ||
ISO Class3 | 1,000 | 237 | 102 | 35 | 8 | |
ISO Class4 | 10,000 | 2,370 | 1,020 | 352 | 83 | |
ISO Class5 | 100,000 | 23,700 | 10,200 | 3,520 | 832 | 29 |
ISO Class6 | 1,000,000 | 237,000 | 102,000 | 35,200 | 8,320 | 293 |
ISO Class7 | 352,000 | 83,200 | 2,930 | |||
ISO Class8 | 3,520,000 | 832,000 | 29,300 | |||
ISO Class9 | 35,200,000 | 8,320,000 | 293,000 | |||
注:由于涉及测量过程的不确定性,故要求用不超过三个有效的浓度数字来确定等级水平 | ||||||
各国洁净度等级近似对照表
个/M≥0.5um | ISO 14644-1 | US 209E(1992) | US 209D(1988) | EEC cGMP(1989) | FRANCE AFNOR(1981) | GERMANY VDI 2083(1990) | JAPAN JAOA(1989) |
1 | - | - | - | - | - | - | - |
3.5 | 2 | - | - | - | - | 0 | 2 |
10.0 | - | M1 | - | - | - | - | - |
35.3 | 3 | M1.5 | 1 | - | - | 1 | 3 |
100 | - | M2 | - | - | - | - | - |
353 | 4 | M2.5 | 10 | - | - | 2 | 4 |
1,000 | - | M3 | - | - | - | - | - |
3,530 | 5 | M3.5 | 100 | A+B | 4,000 | 3 | 5 |
10,000 | - | M4 | - | - | - | - | - |
35,300 | 6 | M4.5 | 1,000 | 1,000 | - | 4 | 6 |
100,000 | - | M5 | - | - | - | - | - |
353,000 | 7 | M5.5 | 10,000 | C | 400,000 | 5 | 7 |
1,000,000 | - | M6 | - | - | - | - | - |
3,530,000 | 8 | M6.5 | 100,000 | D | 4,000,000 | 6 | 8 |
10,000,000 | - | M7 | - | - | - | - | - |
洁净室及洁净区空气中悬浮粒子洁净度等级
空气洁净度等级(N) | 大于或等于表中粒径的最大浓度限值(pc/m3) | |||||
0.1um | 0.2um | 0.3um | 0.5um | 1um | 5um | |
1 | 10 | 2 | ||||
2 | 100 | 24 | 10 | 4 | ||
3 | 1000 | 237 | 102 | 35 | 8 | |
4(十级) | 10000 | 2370 | 1020 | 352 | 83 | |
5(百级) | 100000 | 23700 | 10200 | 3520 | 832 | 29 |
6(千级) | 1000000 | 237000 | 102000 | 35200 | 8320 | 293 |
7(万级) | 352000 | 83200 | 2930 | |||
8(十万级) | 3520000 | 832000 | 29300 | |||
9(一百万级) | 8320000 | 293000 | ||||